Abstract

Sensor technology is being revolutionized by advances in microelectronics and optoelectronics. Thus, modern sensor systems almost always include data acquisition capabilities. Rapid advances in sensor technology have increased the difficulty of the task of finding the best sensor system for a given application. A generic scheme for decision-making is presented. Sensors, generally far from perfect, are often expected to function in hostile environments and to be immune to interference. A variety of sensor technologies are discussed. The most common is silicon processing technology, in which the sensing elements are micromachined into the same chip as the integrated circuit. Also possible are hybrid chips joined after the integrated circuit is formed. Photodetectors, smart sensors, and chemical sensors may be based on silicon processing technology. Other technologies involve the use of acoustic waves, optical fibers, electrochemical systems, and semiconducting metal oxides.

Keywords: sensors; sensor technology; silicon processing; smart sensors; chemical sensors; acoustic wave; optical fibers; microsensors; electrochemical sensors; metal oxide sensors; photodetectors; light emitting diodes