Abstract
After a brief survey of surface and interface analysis methods, a representative selection of the latter is given in an introductory manner, emphasizing the following aspects: (i) analysis of surface morphology [transmission electron microscopy (TEM), scanning electron microscopy (SEM), scanning tunneling microscopy (STM), atomic force microscopy (AFM)], (ii) analysis of surface elemental composition [X-ray photoelectron spectroscopy (XPS), auger electron spectroscopy (AES), sputter depth profiling, ion scattering spectroscopy (ISS), secondary ion mass spectrometry (SIMS)], (iii) analysis of surface molecular composition [Fourier transform infrared spectroscopy (FTIR) and infrared reflection–absorption spectroscopy (IRRAS)]. A biography for further reading is added.
Keywords: surface analysis; interface analysis; sputter depth profiling; electron microscopy; scanning probe microscopy; auger electron spectroscopy; x-ray photoelectron spectroscopy; Fourier transform infrared spectroscopy