Abstract
Vacuum technology concerns the means to predict, effect, and control subatmospheric environments, ie, vacuum. Increasingly, each vacuum environment must be not only safe and cost-, energy-, and materials-effective, but also tailored to serve use profitably. However, as of the late 1990s, the likely interactions between a dynamic endeavor and a potentially profitably serving vacuum environment may still not be straightforward. This article examines such topics as vacuum dynamics, instrumental measurement, vacuum systems and equipment, molecular transport, and problems such as gas leaks.
Keywords: Vacuum technology; Dynamics; Pump down; Leaks; Molecular transport; Instruments; Vacuum systems; Process equipment; Pumps; Applications; Semiconductors