{"id":148,"date":"2006-09-08T11:21:40","date_gmt":"2006-09-08T15:21:40","guid":{"rendered":"http:\/\/softbeam.net\/research\/?p=148"},"modified":"2006-09-08T11:21:40","modified_gmt":"2006-09-08T15:21:40","slug":"chemical-amplification-resists-for-microlithography","status":"publish","type":"post","link":"https:\/\/softbeam.net\/research\/?p=148","title":{"rendered":"Chemical Amplification Resists for Microlithography"},"content":{"rendered":"<p>By courtesy of:<br \/>\n<a id=\"p147\" onmousedown=\"selectLink(147);\" href=\"http:\/\/20.210.105.67\/research\/wp-content\/uploads\/2006\/09\/advpolysci-2005-microlithography.pdf\">Hiroshi Ito<\/a><br \/>\n<a id=\"p147\" onmousedown=\"selectLink(147);\" href=\"http:\/\/20.210.105.67\/research\/wp-content\/uploads\/2006\/09\/advpolysci-2005-microlithography.pdf\">Adv Polym Sci (2005) 172: 37\u00e2\u20ac\u201c245<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"<p>By courtesy of: Hiroshi Ito Adv Polym Sci (2005) 172: 37\u00e2\u20ac\u201c245<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[2,6],"tags":[],"class_list":["post-148","post","type-post","status-publish","format-standard","hentry","category-beam","category-optoelectronics"],"_links":{"self":[{"href":"https:\/\/softbeam.net\/research\/index.php?rest_route=\/wp\/v2\/posts\/148","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/softbeam.net\/research\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/softbeam.net\/research\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/softbeam.net\/research\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/softbeam.net\/research\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=148"}],"version-history":[{"count":0,"href":"https:\/\/softbeam.net\/research\/index.php?rest_route=\/wp\/v2\/posts\/148\/revisions"}],"wp:attachment":[{"href":"https:\/\/softbeam.net\/research\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=148"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/softbeam.net\/research\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=148"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/softbeam.net\/research\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=148"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}